Fundamentals of Nanoscale Film Analysis
Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on anal...
| Main Authors: | , , |
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| Corporate Author: | |
| Language: | English |
| Published: |
New York, NY :
Springer US : Imprint: Springer,
2007.
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| Edition: | 1st ed. 2007. |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-0-387-29261-8 |