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Fundamentals of Nanoscale Film Analysis

Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on anal...

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Main Authors: Alford, Terry L. (Author, http://id.loc.gov/vocabulary/relators/aut), Feldman, L.C. (http://id.loc.gov/vocabulary/relators/aut), Mayer, James W. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2007.
Edition:1st ed. 2007.
Subjects:
Materials science.
Materials—Surfaces.
Thin films.
Nanotechnology.
Solid state physics.
Spectroscopy.
Microscopy.
Condensed matter.
Characterization and Evaluation of Materials.
Surfaces and Interfaces, Thin Films.
Solid State Physics.
Spectroscopy and Microscopy.
Condensed Matter Physics.
Online Access:https://doi.org/10.1007/978-0-387-29261-8
Table of Contents:
  • An Overview: Concepts, Units, and the Bohr Atom
  • Atomic Collisions and Backscattering Spectrometry
  • Energy Loss of Light Ions and Backscattering Depth Profiles
  • Sputter Depth Profiles and Secondary Ion Mass Spectroscopy
  • Ion Channeling
  • Electron-Electron Interactions and the Depth Sensitivity of Electron Spectroscopies
  • X-ray Diffraction
  • Electron Diffraction
  • Photon Absorption in Solids and EXAFS
  • X-ray Photoelectron Spectroscopy
  • Radiative Transitions and the Electron Microprobe
  • Nonradiative Transitions and Auger Electron Spectroscopy
  • Nuclear Techniques: Activation Analysis and Prompt Radiation Analysis
  • Scanning Probe Microscopy.

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