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Ion Beams in Materials Processing and Analysis

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in m...

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Main Authors: Schmidt, Bernd. (Author, http://id.loc.gov/vocabulary/relators/aut), Wetzig, Klaus. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: Vienna : Springer Vienna : Imprint: Springer, 2013.
Edition:1st ed. 2013.
Subjects:
Materials—Surfaces.
Thin films.
Atoms.
Physics.
Surfaces (Physics).
Interfaces (Physical sciences).
Surfaces and Interfaces, Thin Films.
Atomic, Molecular, Optical and Plasma Physics.
Surface and Interface Science, Thin Films.
Online Access:https://doi.org/10.1007/978-3-211-99356-9

Internet

https://doi.org/10.1007/978-3-211-99356-9

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