High Permittivity Gate Dielectric Materials
"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, me...
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2013.
|
| Edition: | 1st ed. 2013. |
| Series: | Springer Series in Advanced Microelectronics,
43 |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-642-36535-5 |