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High Permittivity Gate Dielectric Materials

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, me...

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Corporate Author: SpringerLink (Online service)
Other Authors: Kar, Samares. (Editor, http://id.loc.gov/vocabulary/relators/edt)
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Edition:1st ed. 2013.
Series:Springer Series in Advanced Microelectronics, 43
Subjects:
Electronics.
Microelectronics.
Optical materials.
Electronic materials.
Solid state physics.
Spectroscopy.
Microscopy.
Engineering.
Electronics and Microelectronics, Instrumentation.
Optical and Electronic Materials.
Solid State Physics.
Spectroscopy and Microscopy.
Engineering, general.
Online Access:https://doi.org/10.1007/978-3-642-36535-5
Table of Contents:
  • Historical Perspectives
  • High Mobility Channels
  • Non-Volatile Memory
  • Hafnium-Based Gate Dielectric Materials
  • Lanthanum-Based High-K Gate Dielectric Materials
  • Crystalline High-K Gate Dielectric Materials
  • High-K Gate Dielectric Processing.- Metal Gate Electrodes
  • Flat-Band/Threshold Voltage Control
  • Interfaces and Defects
  • Electrical Characterization and Parameter Extraction
  • Non-Contact Metrology of High-K Gate Dielectrics
  • Channel Mobility
  • High-K Gate Dielectric Reliability Issues
  • Bias Temperature Instability
  • Integration Issues.  .

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