Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD /
This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...
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| Language: | English |
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Cham :
Springer International Publishing : Imprint: Springer,
2017.
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| Edition: | 1st ed. 2017. |
| Series: | SpringerBriefs in Materials,
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| Online Access: | https://doi.org/10.1007/978-3-319-24672-7 |