Dielectric Breakdown in Gigascale Electronics Time Dependent Failure Mechanisms /
This book focuses on the experimental and theoretical aspects of the time-dependent breakdown of advanced dielectric films used in gigascale electronics. Coverage includes the most important failure mechanisms for thin low-k films, new and established experimental techniques, recent advances in the...
| Main Authors: | , , |
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| Corporate Author: | |
| Language: | English |
| Published: |
Cham :
Springer International Publishing : Imprint: Springer,
2016.
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| Edition: | 1st ed. 2016. |
| Series: | SpringerBriefs in Materials,
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| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-319-43220-5 |


