Dielectric Breakdown in Gigascale Electronics Time Dependent Failure Mechanisms /

This book focuses on the experimental and theoretical aspects of the time-dependent breakdown of advanced dielectric films used in gigascale electronics. Coverage includes the most important failure mechanisms for thin low-k films, new and established experimental techniques, recent advances in the...

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Main Authors: Borja, Juan Pablo. (Author, http://id.loc.gov/vocabulary/relators/aut), Lu, Toh-Ming. (http://id.loc.gov/vocabulary/relators/aut), Plawsky, Joel. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
Edition:1st ed. 2016.
Series:SpringerBriefs in Materials,
Subjects:
Online Access:https://doi.org/10.1007/978-3-319-43220-5