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Helium Ion Microscopy Principles and Applications /

Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered includ...

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Main Author: Joy, David C. (Author, http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: New York, NY : Springer New York : Imprint: Springer, 2013.
Edition:1st ed. 2013.
Series:SpringerBriefs in Materials,
Subjects:
Materials science.
Spectroscopy.
Microscopy.
Nanotechnology.
Nanoscale science.
Nanoscience.
Nanostructures.
Characterization and Evaluation of Materials.
Spectroscopy and Microscopy.
Spectroscopy/Spectrometry.
Nanoscale Science and Technology.
Online Access:https://doi.org/10.1007/978-1-4614-8660-2
Table of Contents:
  • Chapter 1: Introduction to Helium Ion Microscopy
  • Chapter 2: Microscopy with Ions  - A brief history
  • Chapter 3: Operating the Helium Ion Microscope
  • Chapter 4: Ion –Solid  Interactions  and Image Formation
  • Chapter 5: Charging and  Damage
  • Chapter 6: Microanalysis with the HIM
  • Chapter 7: Ion Generated Damage
  • Chapter 8: Working with other Ion beams
  • Chapter 9: Patterning and Nanofabrication
  • Conclusion
  • Bibliography
  • Appendix: iSE Yields,  and IONiSE  parameters for  He+ excitation  of Elements and Compounds
  • Index.

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