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Dynamics of Microelectromechanical Systems

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of pro...

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Main Author: Lobontiu, Nicolae. (Author, http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2007.
Edition:1st ed. 2007.
Series:Microsystems, 17
Subjects:
Mechanical engineering.
Electronics.
Microelectronics.
Nanotechnology.
Electronic circuits.
Computer-aided engineering.
Mechanical Engineering.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Computer-Aided Engineering (CAD, CAE) and Design.
Online Access:https://doi.org/10.1007/978-0-387-68195-5

Internet

https://doi.org/10.1007/978-0-387-68195-5

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