Plasma electronics : applications in microelectronic device fabrication
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| Other Authors: | |
| Language: | English |
| Published: |
New York:
Taylor & Francis,
2015.
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| Edition: | 2nd ed.. |
| Series: | Series in Plasma Physics
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| Subjects: |
| Physical Description: | xix, 376 p.: ill.; 23 cm.. |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781482222050 1482222051 |