Plasma electronics : applications in microelectronic device fabrication

Main Author: Makabe, T.
Other Authors: Petrovic, Z.
Language:English
Published: New York: Taylor & Francis, 2015.
Edition:2nd ed..
Series:Series in Plasma Physics
Subjects:

KOLEKSI KHAS

Call Number: TA 2020 .M3 2015
Accession Item Category Format Status Notes
1100097860 Koleksi Buku Berbintik Merah (Red Spot) Book AVAILABLE

KOLEKSI TERBUKA

Call Number: TA 2020 .M3 2015
Accession Item Category Format Status Notes
1100097859 Open Shelf Book AVAILABLE