An introduction to microelectromechanical systems engineering
| Main Author: | |
|---|---|
| Other Authors: | |
| Published: |
Boston:
Artech House,
2004.
|
| Edition: | 2nd ed.. |
| Subjects: |
| LEADER | 00535cam a2200169 7i4500 | ||
|---|---|---|---|
| 001 | 0000047350 | ||
| 005 | 20051207090000.0 | ||
| 020 | # | 0 | |a 1580535909 |
| 090 | 0 | 0 | |a TK 7875 |b M3 2004 |
| 100 | 1 | # | |a Maluf |
| 245 | 1 | 3 | |a An introduction to microelectromechanical systems engineering |c Nadim Maluf, Kirt Williams. |
| 250 | # | # | |a 2nd ed.. |
| 260 | # | # | |a Boston: |b Artech House, |c 2004. |
| 300 | # | # | |a xx, 283 p.: |b ill.; |c 26 cm.. |
| 650 | 0 | 0 | |a Microelectromechanical systems |
| 700 | 1 | 1 | |a Williams, |h Kirt |
| 999 | |a 1100038514 |b Book |c Open Shelf |e KOLEKSI TERBUKA | ||