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An introduction to microelectr...
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An introduction to microelectromechanical systems engineering
Main Author:
Maluf
Other Authors:
Williams,
Published:
Boston:
Artech House,
2004.
Edition:
2nd ed..
Subjects:
Microelectromechanical systems
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Physical Description:
xx, 283 p.: ill.; 26 cm..
ISBN:
1580535909
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