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00584cam a2200181 7i4500 |
| 001 |
0000046968 |
| 005 |
20051016090000.0 |
| 020 |
# |
0 |
|a 352730746X
|
| 090 |
0 |
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|a TK 7875
|b E5
|
| 245 |
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|a Enabling technology for MEMS and nanodevices
|c edited by H. Baltes ... [et al.].
|
| 260 |
# |
# |
|a Weinheim:
|b Wiley-VCH,
|c 2004.
|
| 300 |
# |
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|a xii, 427 p.:
|b ill.;
|c 25 cm..
|
| 490 |
0 |
0 |
|a Advanced micro & nanosystems;
|v v. 1
|
| 650 |
0 |
0 |
|a Microelectronics
|
| 650 |
0 |
0 |
|a Nanotechnolo
|
| 650 |
0 |
0 |
|a Microelectromechanical systems
|
| 700 |
1 |
1 |
|a Baltes,
|h H.
|
| 999 |
|
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|a 1100037937
|b Book
|c Open Shelf
|e KOLEKSI TERBUKA
|
