Enabling technology for MEMS and nanodevices
| Other Authors: | |
|---|---|
| Published: |
Weinheim:
Wiley-VCH,
2004.
|
| Series: | Advanced micro & nanosystems;
v. 1 |
| Subjects: |
| Physical Description: | xii, 427 p.: ill.; 25 cm.. |
|---|---|
| ISBN: | 352730746X |