CMOS Hotplate Chemical Microsensors
This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microf...
Main Authors: | , , , |
---|---|
Corporate Author: | |
Language: | English |
Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2007.
|
Edition: | 1st ed. 2007. |
Series: | Microtechnology and MEMS,
|
Subjects: | |
Online Access: | https://doi.org/10.1007/978-3-540-69562-2 |