Cover Image

Dry Etching Technology for Semiconductors

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits.  The author describes the device manufacturing flow, and explains in which p...

Full description

Main Author: Nojiri, Kazuo. (Author, http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2015.
Edition:1st ed. 2015.
Subjects:
Electronic circuits.
Semiconductors.
Circuits and Systems.
Electronic Circuits and Devices.
Online Access:https://doi.org/10.1007/978-3-319-10295-5

Internet

https://doi.org/10.1007/978-3-319-10295-5

Similar Items