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Design, Modeling and Control of Nanopositioning Systems

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell s...

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Main Authors: Fleming, Andrew J. (Author, http://id.loc.gov/vocabulary/relators/aut), Leang, Kam K. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2014.
Edition:1st ed. 2014.
Series:Advances in Industrial Control,
Subjects:
Control engineering.
Mechatronics.
Manufactures.
Industrial engineering.
Production engineering.
Control and Systems Theory.
Manufacturing, Machines, Tools, Processes.
Industrial and Production Engineering.
Online Access:https://doi.org/10.1007/978-3-319-06617-2
Table of Contents:
  • Introduction
  • Piezoelectric Transducers
  • Types of Nanopositioners
  • Mechanical Design: Flexure-based Nanopositioners
  • Position Sensors
  • Shunt Control
  • Feedback Control
  • Force Feedback Control
  • Feedforward Control
  • Command Shaping
  • Hysteresis Modeling and Control
  • Charge Drives
  • Noise in Nanopositioning Systems
  • Electrical Considerations.

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