Integration of Functional Oxides with Semiconductors
This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...
| Main Authors: | , |
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| Corporate Author: | |
| Language: | English |
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New York, NY :
Springer New York : Imprint: Springer,
2014.
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| Edition: | 1st ed. 2014. |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-1-4614-9320-4 |
Table of Contents:
- Introduction
- Critical issues in Oxide-Semiconductor Heteroepitaxy
- Predictive Engineering of Semiconductor-Oxide Interfaces
- Crystalline Functional Oxide Growth Methods
- Thin Oxide Film Characterization Methods
- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy
- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates
- Other Epitaxial Oxides on Semiconductors
- Outlook and Parting Thoughts
- Appendices.