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Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent...

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Main Authors: Sugioka, Koji. (Author, http://id.loc.gov/vocabulary/relators/aut), Cheng, Ya. (http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Language:English
Published: London : Springer London : Imprint: Springer, 2014.
Edition:1st ed. 2014.
Series:SpringerBriefs in Applied Sciences and Technology,
Subjects:
Nanotechnology.
Lasers.
Photonics.
Optical materials.
Electronic materials.
Nanotechnology and Microengineering.
Optics, Lasers, Photonics, Optical Devices.
Optical and Electronic Materials.
Online Access:https://doi.org/10.1007/978-1-4471-5541-6
Table of Contents:
  • Fundamentals of femtosecond laser processing
  • Fabrication of microfluidic structures in glass
  • Fabrication of micromechanics
  • Fabrication of microoptical components in glass
  • Fabrication of microelectronics in glass
  • Integration of microcomponents
  • Applications of microfluidics and optifluidics fabricated by femtosecond laser
  • Summary and outlook.

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