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Thin film materials technology : sputtering of compound materials

Main Author: Wasa, Kiyotaka (Author)
Other Authors: Kitabatake, Makoto, Adachi, Hideaki
Published: New York: Springer-Verlag, 2004
Subjects:
Thin films
Cathode sputtering ( Plating process)
Item Description:Includes index
Physical Description:xiv, 518 pages: illustration; 24 cm.
ISBN:9783642059315

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