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Atomic layer deposition for semiconductors

Other Authors: Seong Hwang, Cheol
Language:English
Published: Springer, 2014.
Subjects:
Semiconductors -- > Surfaces

KOLEKSI TERBUKA

Call Number: TK 7871.85 .A8 2014
Accession Item Category Format Status Notes
1100101113 Open Shelf Book AVAILABLE

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