Plasma nanoscience : basic concepts and applications of deterministic nanofabrication
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| Language: | English |
| Published: |
Weinheim:
Wiley-VCH,
2008.
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| Physical Description: | xxv, 538 p.: ill. (some col.); 25 cm.. |
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| Bibliography: | Includes bibliographical references (p. 499-527) |
| ISBN: | 9783527407408 |