Cover Image

Microlithography : science and technology

Other Authors: Smith, Bruce W.( 1959-), Suzuki, Kazuaki
Language:English
Published: Boca Raton: CRC Press, 2007.
Edition:2nd ed..
Subjects:
Microlithography -- > Industrial applications
Integrated circuits -- > Masks
Metal oxide semiconductors, Complementary -- > Design and construction
Manufacturing processes

KOLEKSI TERBUKA

Call Number: TK 7836 .M5 2007
Accession Item Category Format Status Notes
1100065702 Open Shelf Book AVAILABLE

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