CMOS-MEMS
| Other Authors: | , |
|---|---|
| Published: |
Weinheim:
Wiley-VCH,
2005.
|
| Series: | Advanced micro & nanosystems;
v. 2 |
| Subjects: |
| Physical Description: | xiv, 594 p.: ill.; 25 cm.. |
|---|---|
| ISBN: | 3527310800 |
| Other Authors: | , |
|---|---|
| Published: |
Weinheim:
Wiley-VCH,
2005.
|
| Series: | Advanced micro & nanosystems;
v. 2 |
| Subjects: |
| Physical Description: | xiv, 594 p.: ill.; 25 cm.. |
|---|---|
| ISBN: | 3527310800 |