Introduction to microfabrication

Main Author: Franssila
Published: Chichester, West Sussex, England: J. Wiley, 2004.
Subjects:
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020 # 0 |a 0470851066 (pbk.)  
020 # 0 |a 0470851058 (cloth)  
090 0 0 |a TK 7875   |b F7 
100 1 # |a Franssila  
245 1 0 |a Introduction to microfabrication   |c Sami Franssila. 
260 # # |a Chichester, West Sussex, England:   |b J. Wiley,   |c 2004. 
300 # # |a xvii, 401 p.:   |b ill.;   |c 26 cm.. 
650 0 0 |a Electronic apparatus and appliances  
650 0 0 |a Microfabrication  
650 0 0 |a Microelectromechanical systems  
999 |a 1100037503  |b Book  |c Open Shelf  |e KOLEKSI TERBUKA