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00588cam a2200181 7i4500 |
001 |
0000046849 |
005 |
20051030090000.0 |
020 |
# |
0 |
|a 0470851066 (pbk.)
|
020 |
# |
0 |
|a 0470851058 (cloth)
|
090 |
0 |
0 |
|a TK 7875
|b F7
|
100 |
1 |
# |
|a Franssila
|
245 |
1 |
0 |
|a Introduction to microfabrication
|c Sami Franssila.
|
260 |
# |
# |
|a Chichester, West Sussex, England:
|b J. Wiley,
|c 2004.
|
300 |
# |
# |
|a xvii, 401 p.:
|b ill.;
|c 26 cm..
|
650 |
0 |
0 |
|a Electronic apparatus and appliances
|
650 |
0 |
0 |
|a Microfabrication
|
650 |
0 |
0 |
|a Microelectromechanical systems
|
999 |
|
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|a 1100037503
|b Book
|c Open Shelf
|e KOLEKSI TERBUKA
|