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Circuits and Systems 1 Communications Engineering, Networks 1 Electrical engineering 1 Electronic circuits 1 Electronics 1 Electronics and Microelectronics, Instrumentation 1 Microelectronics 1 more ...
1
Published 2013
Table of Contents: ';
“...Part I. NEMS/MEMS Devices -- 1. Thin Film Bulk Acoustic Wave Resonators -- 2. Contour-Mode Aluminum...”Get full text